The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Jul. 07, 2022
Screen Holdings Co., Ltd., Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A substrate processing apparatus includes a substrate holding member that holds a substrate in a predetermined processing posture, a polymer film forming member that forms a polymer film that contains a photoacid generator that generates an acid by light irradiation and that contains a polymer on a first principal surface of the substrate held by the substrate holding member, a light emission member that emits light and that irradiates light onto a peripheral edge portion of the first principal surface of the substrate held by the substrate holding member, and a reflection suppression member including a first portion that is placeable at an adjoining position that adjoins an irradiation region, onto which light from the light emission member is irradiated, of the peripheral edge portion of the first principal surface of the substrate held by the substrate holding member from a center portion side of the first principal surface of the substrate.