The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Apr. 30, 2024
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Bhaskar Prasad, Adityapur, IN;
Thomas Brezoczky, Los Gatos, CA (US);
Kirankumar Neelasandra Savandaiah, Bangalore, IN;
Mayank Dwivedi, Bangalore, IN;
Alexander Sendobry, Mühltal, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 72/30 (2026.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/3204 (2026.01); H10P 72/0606 (2026.01); H10P 72/3218 (2026.01);
Abstract
A station for a substrate processing system that includes a magnetic levitation actuator assembly disposed in a first region of the station that is separated from a second region of the station by a membrane. The magnetic levitation actuator assembly is configured to contactlessly convey a carrier disposed in the second region to one or more positions within the second region.