The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Aug. 14, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Deepak Patel, Karnataka, IN;
Pandu Maddherla, Karnataka, IN;
Sushant S. Koshti, Sunnyvale, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A load lock including a substrate support device for supporting a substrate, and an indexer coupled to the substrate support device. The substrate support device may take measurements and acquire data to verify features of the supported substrate and an associated manufacturing system. Substrate features that are measured include, substrate temperature, substrate warping, and a substrate presence, absence, or misplacement on the support device. System features that are measured include system vibrations and substrate transfer mechanism calibration data. The substrate support device sensors and communications circuits can be integrated into the substrate support device, through use of an additive manufacturing process in making the substrate support device.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile