The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Oct. 25, 2022
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Young Joon Han, Chungcheongnam-do, KR;
Gi Hun Choi, Chungcheongnam-do, KR;
Seung Tae Yang, Chungcheongnam-do, KR;
Sang Woo Park, Chungcheongnam-do, KR;
Seong Hyeon Kim, Chungcheongnam-do, KR;
Bu Young Jung, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0414 (2026.01); H10P 72/0432 (2026.01);
Abstract
A substrate processing apparatus includes a nozzle unit including a nozzle tip discharging liquid to a substrate; and a liquid supply line supplying the liquid to the nozzle unit, wherein the liquid supply line includes a liquid supply pipe connected to the nozzle tip; a supply valve installed in the liquid supply pipe; and a heater disposed between the nozzle tip and the supply valve in the liquid supply pipe.