The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2026

Filed:

Aug. 27, 2021
Applicant:

Ihp Gmbh—innovations for High Performance Microelectronics/leibniz-institut Fur Innovative Mikroele, Frankfurt, DE;

Inventor:

Stefan Lischke, Frankfurt, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10F 30/223 (2025.01); H10F 71/00 (2025.01); H10F 77/12 (2025.01); H10F 77/14 (2025.01); H10F 77/20 (2025.01); H10F 77/40 (2025.01); G02F 1/015 (2006.01); G02F 1/025 (2006.01);
U.S. Cl.
CPC ...
H10F 30/223 (2025.01); H10F 71/121 (2025.01); H10F 77/12 (2025.01); H10F 77/147 (2025.01); H10F 77/206 (2025.01); H10F 77/413 (2025.01); G02F 1/0157 (2021.01); G02F 1/025 (2013.01);
Abstract

A diode comprises a p-doped region, an n-doped region, and a light-sensitive intrinsic region sandwiched laterally between the p-doped region and the n-doped region in a direction transverse to a direction of light propagation in the diode. The p-doped region is made of a first material doped with a first type of dopant and the n-doped region is made of a third material doped with a second type of dopant. The first material includes Si or SiGe. The third material includes Si or SiGe. The intrinsic region is made of a second material, that includes Ge, GeSn, or SiGe. The intrinsic region has a maximal lateral extension between two lateral ends of the intrinsic region of equal to or below 400 nm. The p-doped region and the n-doped region are in-situ doped such that the intrinsic region is not doped when the diode is produced.


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