Nor-type memory device having decreased channel resistance, method of manufacturing nor-type memory device, and electronic apparatus including memory device

Abstract

Disclosed are a NOR-type memory device, a method of manufacturing the NOR-type memory device, and an electronic apparatus. The NOR-type memory device may include: a plurality of device layers stacked on a substrate, wherein each device layer includes a first source/drain region and a second source/drain region at opposite ends of the device layer in a vertical direction, and a channel region between the first and second source/drain region; and a gate stack that extends vertically with respect to the substrate to pass through each device layer. The gate stack includes a gate conductor layer and a memory functional layer between the gate conductor layer and the device layer. A memory cell is defined at an intersection of the gate stack and the device layer. A doping concentration in each of the first and second source/drain regions decreases towards the channel region in the vertical direction.