The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
May. 05, 2023
Lam Research Corporation, Fremont, CA (US);
Craig Rosslee, San Jose, CA (US);
Ambarish Chhatre, Danville, CA (US);
Dan Marohl, San Jose, CA (US);
David Setton, Danville, CA (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A window support system for a plasma processing chamber includes a window support frame configured to circumscribe an opening. The window support frame has a top surface, a bottom surface, an inner surface, and an outer surface. Each of the inner surface and outer surface extends between the top surface and the bottom surface. A channel is formed within the outer surface. The top surface is configured to mechanically and thermally interface with an outer peripheral portion of a window that is substantially transparent to radiofrequency power. The window support system also includes a heating element disposed within the channel of the window support frame. The heating element is configured to substantially circumscribe the window support frame.