The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2026

Filed:

May. 05, 2024
Applicant:

Southeast University, Jiangsu, CN;

Inventors:

Aiguo Song, Jiangsu, CN;

Jingjing Xu, Jiangsu, CN;

Yuhan Chen, Jiangsu, CN;

Baoguo Xu, Jiangsu, CN;

Huijun Li, Jiangsu, CN;

Assignee:

SOUTHEAST UNIVERSITY, Jiangsu, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/22 (2006.01); G01L 5/16 (2020.01); G01L 5/161 (2020.01); G01L 5/162 (2020.01); G01L 5/1627 (2020.01);
U.S. Cl.
CPC ...
G01L 1/2206 (2013.01); G01L 1/2262 (2013.01); G01L 1/2287 (2013.01); G01L 5/16 (2013.01); G01L 5/161 (2013.01); G01L 5/162 (2013.01); G01L 5/1627 (2020.01);
Abstract

A combined structure of a thin film sputtered high-precision six-dimensional force sensor includes a cross beam, a double U-shaped beam, a base, a top cover, a bottom cover and thin film strain gauges. Strain gauges are sputtered on the main beam to form six sets of Wheatstone bridges, with three sets on the cross beam and three sets on the double U-shaped beam. The measurement method of the six-dimensional force sensor is that: an input force/moment of a certain dimension acts on the center of the cross beam and the center of the double U-shaped beam, so that the sensor is deformed and resistance values of strain gauges at corresponding positions change, thereby changing output voltages of corresponding bridges.


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