The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Oct. 10, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Keith T. Wong, Mountain View, CA (US);
Hyojin Kim, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); C23C 16/02 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); H10B 12/00 (2023.01); H10D 30/67 (2025.01);
U.S. Cl.
CPC ...
C23C 16/305 (2013.01); C23C 16/0227 (2013.01); C23C 16/45553 (2013.01); C23C 16/56 (2013.01); H10B 12/00 (2023.02); H10D 30/675 (2025.01);
Abstract
Methods of depositing a molybdenum sulfide film with increased sulfur:molybdenum ratio are described. The methods include pre-cleaning a dielectric material with oxygen radicals prior to formation of a molybdenum sulfide film that has a lower oxygen content than would be formed without the pre-cleaning.
Wong, Keith. (2026). Dram devices having molybdenum sulfide channel (U.S. Patent No. 12723307). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12723307
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile