The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Sep. 09, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Shivaprakash Padadayya Hiremath, Bangalore, IN;
Hanish Kumar Panavalappil Kumarankutty, Bangalore, IN;
Kirubanandan Naina Shanmugam, Bangalore, IN;
Madhukar Krishna, Bengaluru, IN;
Sriharsha Dharmapura Sathyanarayanamurthy, Bengaluru, IN;
Sriharish Srinivasan, Bangalore, IN;
Applied Materials Inc., Santa Clara, CA (US);
Abstract
Embodiments of heated lids for a process chamber are provided herein. In some embodiments, a heated lid includes: a body having a central region and a peripheral region, wherein the body includes a central opening in the central region, wherein the peripheral region includes a plurality of vertical slots that extend into an upper surface of the body and arranged along a circle to provide a thermal break, and wherein the body includes one or more annular plenums that extend into the upper surface of the body and a plurality of holes extending through a bottom surface of the one or more annular plenums to a lower surface of the body; a first heater ring having one or more heating elements disposed therein, wherein the first heater ring is coupled to the central region of the body; and a second heater ring having one or more heating elements disposed therein.