The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Oct. 26, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Theodorus G.M. Oosterlaken, Oudewater, NL;
Kelly Houben, Lubbeek, BE;
Herbert Terhorst, Amersfoort, NL;
Cornelis Herbschleb, Leiden, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01); H10P 14/60 (2026.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0402 (2026.01); C23C 16/45512 (2013.01); C23C 16/45561 (2013.01); C23C 16/45574 (2013.01); C23C 16/45578 (2013.01); H10P 14/6338 (2026.01);
Abstract
A gas injector assembly and a substrate processing apparatus comprising the gas injector assembly is disclosed. Embodiments of the presently described gas injector assembly comprise a gas injector, a first precursor gas supply conduit and a second precursor gas supply conduit. A size of the first precursor gas supply conduit is larger than the size of the second precursor gas supply conduit.