The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Sep. 01, 2022
Applicant:
Kyocera Technologies Oy, Espoo, FI;
Inventors:
Ville Saarela, Espoo, FI;
Matias Perttilä, Espoo, FI;
Antti Jaakkola, Espoo, FI;
Aarne Oja, Espoo, FI;
Panu Koppinen, Espoo, FI;
Antti Rautiainen, Espoo, FI;
Assignee:
KYOCERA Technologies Oy, Espoo, FI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 3/007 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02448 (2013.01); H03H 3/0076 (2013.01);
Abstract
A MEMS (microelectromechanical system) resonator () comprising a substrate (), a resonator element (), and a cavity (). The resonator element () is separated from the substrate () by said cavity (), and the resonator element () comprises a layer of single-crystalline silicon (). The layer of single-crystalline silicon () is doped with phosphorus atoms to obtain a specific doping profile.