The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Aug. 21, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Arvinder Manmohansingh Chadha, San Jose, CA (US);
Syed Nazmul Ahsan, Folsom, CA (US);
Glen T Mori, Gilroy, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); H01J 2237/002 (2013.01);
Abstract
A substrate support assembly including a shaft and a susceptor disposed on the shaft. The susceptor is configured to support a substrate in a processing chamber during a substrate processing operation. The substrate support assembly comprises cooling features configured to cool the susceptor at a cooling rate of greater than 2 degrees Celsius per minute subsequent to the substrate processing operation.