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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12719026 B1

PDFFull Text
Date of Patent:
Aug. 25, 2026

Filed:

Dec. 08, 2017

Rare-earth oxide based erosion resistant coatings for semiconductor application

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jennifer Y. Sun, Mountain View, CA (US);

Biraja P. Kanungo, San Jose, CA (US);

Tom Cho, Los Altos, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Aaron Austin

Int. Cl.
CPC ...
H01J 37/32 (2006.01); C04B 41/00 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); C04B 41/87 (2013.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C23C 16/4404 (2013.01); Y10T 428/131 (2015.01); Y10T 428/26 (2015.01);
Abstract

An article includes a body that is coated with a ceramic coating. The ceramic coating may include YOin a range between about 45 mol % to about 99 mol %, ZrOin a range between about 0 mol % to about 55 mol %, and AlOin a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include YOin a range between about 30 mol % to about 60 mol %, ZrOin a range between about 0 mol % to about 20 mol %, and AlOin a range between about 30 mol % to about 60 mol %.

Find Patent Forward Citations

Sun, Jennifer. (2026). Rare-earth oxide based erosion resistant coatings for semiconductor application (U.S. Patent No. 12719026). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12719026

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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