The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2026

Filed:

Jun. 22, 2023
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Satoru Jimbo, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2022.01); G06T 7/00 (2017.01); G06T 7/13 (2017.01); G06T 7/50 (2017.01); G06T 7/60 (2017.01); G06V 10/44 (2022.01);
U.S. Cl.
CPC ...
G06T 7/0008 (2013.01); G06T 7/13 (2017.01); G06T 7/50 (2017.01); G06T 7/60 (2013.01); G06V 10/44 (2022.01); G06V 2201/07 (2022.01);
Abstract

An evaluation apparatus includes an obtaining unit configured to obtain an image of an evaluation region including a film forming region on which a film is formed by a film forming process, and a processor configured to process the image for the evaluation. The processor is configured to output a feature concerning an abnormality in the image in accordance with a learned model. The image and design information representing a geometrical feature of the film forming region are input to the learned model.


Find Patent Forward Citations

Loading…