The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2026

Filed:

Dec. 13, 2023
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Masayoshi Fujimoto, Tochigi, JP;

Ryosuke Hamamoto, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/24 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/24 (2013.01); G03F 7/70716 (2013.01);
Abstract

An imprint method of forming a patterned composition on a shot region of a substrate by using a mold having a concave-convex pattern includes filling a concave portion of the concave-convex pattern of the mold with a first composition by bringing the mold into contact with the first composition on a predetermined region and then separating the mold from the predetermined region in a state in which the first composition on the predetermined region is uncured. The mold having undergone the filling is brought into contact with a second composition on the shot region, thereby integrating the first composition filling the concave portion of the concave-convex pattern of the mold with the second composition on the shot region to form an integrated composition. The integrated composition is cured to form the patterned composition and separated from the mold.


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