The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2026

Filed:

Mar. 25, 2022
Applicant:

Maruzen Petrochemical Co., Ltd., Tokyo, JP;

Inventors:

Daisuke Tabata, Ichihara, JP;

Tatsuya Tsukamoto, Ichihara, JP;

Yoshiyuki Furuya, Ichihara, JP;

Ryo Sato, Ichihara, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/59 (2006.01); C08F 220/18 (2006.01); C08F 220/28 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G01N 21/59 (2013.01); C08F 220/1806 (2020.02); C08F 220/283 (2020.02); G03F 7/038 (2013.01); G03F 7/039 (2013.01);
Abstract

[Problem to be solved] An object of the present invention is to provide a method for evaluating the dissolution properties of a resist polymer, which method allows for an easy evaluation without requiring complicated processes, and with a high sensitivity. [Solution] The method for evaluating the dissolution properties of a resist polymer according to the present invention includes the following steps (i) to (iii): the step (i) of dissolving the resist polymer in a solvent to prepare a test solution; the step (ii) of adding a solvent dropwise to the test solution while stirring the test solution, and measuring in real time the weight of the solvent added dropwise and the change in the turbidity of the test solution, as the dropwise addition proceeds; and the step (iii) of calculating the amount of the solvent added dropwise until the turbidity of the test solution reaches a predetermined value.


Find Patent Forward Citations

Tabata, Daisuke. (2026). Method for evaluating resist polymer (U.S. Patent No. 12716841). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12716841

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