The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Jan. 26, 2024
Canon Kabushiki Kaisha, Tokyo, JP;
Yoshihiro Shiode, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A measurement method of measuring deflection of a mold by measuring Newton's rings obtained by pressing the mold on a substrate with a resist interposed therebetween and irradiating the substrate with light via the mold includes: performing the pressing through the resist having a height less than an optical distance λ/4, λ being a wavelength of the light; measuring peak positions of the Newton's rings in a contact boundary portion between the mold and the substrate in a region in which a gap between the mold and the substrate is less than the optical distance λ/4; and calculating the deflection of the mold based on the peak positions.