The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Dec. 27, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Joseph Frederick Behnke, San Jose, CA (US);
Carlaton Wong, Sunnyvale, CA (US);
Albert Barrett Hicks, III, Sunnyvale, CA (US);
Steven Darrell Marcus, San Jose, CA (US);
Joseph Frederick Sommers, Roseville, CA (US);
Christopher Laurent Beaudry, San Jose, CA (US);
Timothy Joseph Franklin, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes affixing a supply apparatus to inlets for one or more channels of a chamber component. The channels provide one or more gas flow paths between a first side of the chamber component that comprises the inlets and a second side of the chamber component comprising outlets of the one or more channels. The method further includes affixing an exhaust apparatus to the outlets of the one or more channels. The method further includes performing a plurality of atomic layer deposition cycles to deposit a corrosion resistant coating on interior surfaces of the one or more channels of the chamber component.