The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Aug. 24, 2022
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C07C 381/12 (2006.01); C07D 307/00 (2006.01); C07D 307/56 (2006.01); C07D 307/68 (2006.01); C07D 321/10 (2006.01); C07D 333/28 (2006.01); C07D 333/40 (2006.01); C08F 220/12 (2006.01); C08F 220/26 (2006.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
C07C 381/12 (2013.01); C07D 307/00 (2013.01); C07D 307/56 (2013.01); C07D 307/68 (2013.01); C07D 321/10 (2013.01); C07D 333/28 (2013.01); C07D 333/40 (2013.01); C08F 220/12 (2013.01); C08F 220/26 (2013.01); G03F 7/0045 (2013.01);
Abstract
Disclosed are a salt represented by formula (I), an acid generator, and a resist composition including the same: wherein Rto Reach represent a halogen atom, a haloalkyl group, etc., A, Aand Aeach represent a hydrocarbon group, the group may have a substituent, —CH— in the group may be replaced by —O—, —CO—, —S—, etc., X, Xand Xeach represent —O— or —S—, m1 represents an integer of 1 to 5, m2, m3, m8 and m9 represent an integer of 0 to 5, m4, m5 and m6 represent an integer of 0 to 3, m7 represents an integer of 0 to 4, 1≤m1+m7≤5, 0≤m2+m8≤5, 0≤m3+m9≤5, and AIrepresents an organic anion.