The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Jul. 27, 2023
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Jhon Jhy Liaw, Hsinchu County, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A method includes forming a fin protruding from a substrate, forming first and second gate structures across the fin, the first gate structure having a first gate sidewall facing the second gate structure, the second gate structure having a second gate sidewall facing the first gate structure, recessing a segment of the fin between the first and second gate sidewalls to form a trench, depositing a dielectric layer over the first and second gate sidewalls and within the trench, and depositing an inter-layer dielectric layer over the first and second gate structures and over the dielectric layer. A portion of the inter-layer dielectric layer is within the trench.