The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Dec. 08, 2020
Epic Mems (Xiamen) Co., Ltd, Xiamen, CN;
EPIC MEMS (XIAMEN) CO., LTD, Xiamen, CN;
Abstract
An acoustic wave device and a filter. The acoustic wave device comprises: a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer, which are sequentially stacked from bottom to top, where at least one air cavity is disposed in the substrate at a region corresponding to the upper electrode layer, and at least one of: a first hanging bridge is located at a portion of the upper electrode layer which connects to outside, first hanging roofs are located at an edge and an inner portion of the upper electrode layer, and at least one via hole runs through one of the first hanging roofs which is located at the inner portion of the upper electrode layer; a quantity of the at least one air cavity is greater than one; or the upper electrode layer has a recess extending along a horizontal direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile