The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Dec. 15, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Roger B. Fish, Bedford, MA (US);
Jeffrey E. Krampert, Topsfield, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3171 (2013.01);
Abstract
A system that reduces the buildup of film on a movable shaft that enters and is retracted from a process chamber is disclosed. A ring heater is disposed around the shaft inside the process chamber proximate the air bearing. The ring heater includes a plurality of optical energy emitters arranged around the shaft. The wavelength emitted by the ring heater may be selected to align with the absorption spectrum of the film. In this way, the optical energy serves to heat the film and lower the tendency for the film to adhere to the movable shaft and enter the air bearing.