The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2026

Filed:

Apr. 27, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Kalaivanan Mohanadass, Santa Clara, CA (US);

Shu-Kwan Lau, Sunnyvale, CA (US);

Daniel Coschigano, Beacon, NY (US);

Jayanth Devaraja Swamy, Bangalore, IN;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/46 (2006.01); G01S 17/08 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/46 (2013.01); G01S 17/08 (2013.01);
Abstract

An alignment assembly includes a sensor and a lid that includes a first window. The alignment assembly also includes a rotary joint coupled to the lid. The alignment assembly also includes a jig coupled to the rotary joint and pivotable relative to the lid about the rotary joint. The jig includes an extendable arm that is moveable from a retracted position where the sensor is disposed in a first position above the first window to an extended position where the sensor is disposed at a second position above the first window. The alignment assembly also includes a lock configured to selectively pivotably lock the jig to the lid and also to selectively lock the extendable arm in the retracted position or the extended position.


Find Patent Forward Citations

Mohanadass, Kalaivanan. (2026). Jig for alignment in relation to a process chamber, and related apparatus, systems, and methods (U.S. Patent No. 12703918). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12703918

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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