The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Jun. 29, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Hwanyeol Park, Suwon-si, KR;
Kyungnam Kang, Hwaseong-si, KR;
Jeonghoon Nam, Suwon-si, KR;
Sejin Kyung, Seoul, KR;
Daewee Kong, Yongin-si, KR;
Taemin Kim, Seongnam-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); C23C 16/50 (2006.01); H01J 37/32 (2006.01); H05B 3/12 (2006.01); H05B 3/28 (2006.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); C23C 16/45565 (2013.01); C23C 16/46 (2013.01); C23C 16/50 (2013.01); H01J 37/32724 (2013.01); H05B 3/12 (2013.01); H05B 3/283 (2013.01); H10P 72/7616 (2026.01); H01J 2237/3321 (2013.01); H05B 2203/005 (2013.01); H05B 2203/016 (2013.01);
Abstract
A substrate support unit includes: a ceramic body having a surface for supporting a substrate, the ceramic body including aluminum nitride (AlN), a heat generating resistor disposed in the ceramic body, and including molybdenum (Mo), and a coating layer surrounding the heat generating resistor, and including molybdenum aluminum nitride (MoAlN).