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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12703140 B1

PDFFull Text
Date of Patent:
Aug. 11, 2026

Filed:

Jul. 15, 2024

Imprint apparatus and article manufacturing method

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Tomokazu Taki, Tochigi, JP;

Assignee:

CANON KABUSHIKI KAISHA, Tokyo, JP;

Attorney:

ROSSI, KIMMS & McDOWELL LLP

Primary Examiner:

Leo B Tentoni

Int. Cl.
CPC ...
B29C 41/20 (2006.01); B29C 41/36 (2006.01); B29C 41/52 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); B41F 1/18 (2006.01); G01B 11/02 (2006.01); G03F 7/00 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
B29C 59/002 (2013.01); B29C 59/026 (2013.01); G01B 11/026 (2013.01); G03F 7/0002 (2013.01); G03F 9/7042 (2013.01);
Abstract

An imprint apparatus including a measurement unit configured to measure a distance to a surface of a mold held by a mold holding unit, thereby obtaining a measurement value, and a control unit configured to perform measurement processing of measuring the distance by the measurement unit for a plurality of portions of a structure provided on the surface of the mold while driving the measurement unit, wherein the measurement value includes a cyclic error caused by a distance between the measurement unit and the mold, and before performing the measurement processing, the control unit adjusts a position of the mold holding unit in a direction intersecting a reference surface such that the distance falls within a distance range corresponding to a range where the measurement value is insensitive to the cyclic error.

Find Patent Forward Citations

Taki, Tomokazu. (2026). Imprint apparatus and article manufacturing method (U.S. Patent No. 12703140). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12703140

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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