The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
May. 13, 2024
Canon Kabushiki Kaisha, Tokyo, JP;
Hiroyuki Koide, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus performs alignment between a substrate and a mold in a state in which the mold is in contact with an imprint material on the substrate, and then cures the imprint material by light irradiation. The apparatus includes a light irradiator configured to perform first light irradiation for partially curing the imprint material, and second light irradiation for deforming the substrate, and a controller configured to control the light irradiator. In the alignment, the controller performs switching between the first light irradiation and the second light irradiation based on a viscoelasticity of the imprint material or a deformation amount of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile