The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Oct. 14, 2022
École DE Technologie Supérieure, Montreal, CA;
Frederic Nabki, Montreal, CA;
Mathieu Gratuze, Montreal, CA;
ÉCOLE DE TECHNOLOGIE SUPÉRIEURE, Montreal, CA;
Abstract
Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) exploiting microelectromechanical systems (MEMS) support monolithic integration with silicon based CMOS electronic thereby leveraging the cost benefits of large wafer automated silicon processing. However, nonlinear behaviour in MEMS resonators compromises their performance in some applications whilst being desired in other applications. Accordingly, the inventors have established techniques for the characterisation of the nonlinear behaviour allowing designers to tailor the design and manufacturing of the MEMS resonators to particular applications. Further, there are provided drive schemes for these MEMS resonators for improved performance with respect to the generation of pulses from such MEMS resonators.