The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2026

Filed:

Sep. 02, 2022
Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Tae Sub Lee, Seoul, KR;

Gyu Hyun Kim, Cheonan-si, KR;

Sung Yong Lee, Yongin-si, KR;

Dong Hyuk Seo, Pyeongtaek-si, KR;

Assignee:

Semes Co., Ltd., Cheonan-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0434 (2026.01); H10P 72/0404 (2026.01); H10P 72/0602 (2026.01);
Abstract

Provided is a heating unit including: a heating plate for heating a substrate; a heater installed in the heating plate; and a control unit for controlling the heater, in which wherein the heater includes: a first heater; and a second heater installed at a position different from a position of the first heater, and the control unit includes: a power source for transferring power to at least one of the first heater and the second heater; and a switching module for connecting the first heater and the second heater in series or connecting the first heater and the second heater in parallel.


Find Patent Forward Citations

Lee, Tae. (2026). Heating unit, substrate treating apparatus including the same, method of controlling heating unit (U.S. Patent No. 12701952). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12701952

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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