The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Apr. 18, 2024
Ngk Insulators, Ltd., Nagoya, JP;
NGK INSULATORS, LTD., Nagoya, JP;
Abstract
There is provided a ceramic susceptor including a disk-shaped ceramic plate bonded body including an upper ceramic plate and a lower ceramic plate, an internal electrode embedded in the bonded body, and a purge gas groove, a vacuum suction groove, and a thermocouple insertion groove that are respectively provided on a bonding surface side of the upper ceramic plate or the lower ceramic plate. The ceramic plate bonded body has a central zone and an outer peripheral zone. The purge gas groove, the vacuum suction groove, and the thermocouple insertion groove respectively have straight-line portions in the central zone. An angle θformed by a straight-line portion of the purge gas groove and a straight-line portion of the thermocouple insertion groove, and an angle θformed by the straight-line portion of the purge gas groove and a straight-line portion of the vacuum suction groove satisfy 90°<θ<180°, 135°<θ<225°, and θ<θ.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile