The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Nov. 05, 2024
Samsung Electronics Co., Ltd., Suwon-si, KR;
Ha Dong Jin, Suwon-si, KR;
Nam Kyun Kim, Suwon-si, KR;
Sung-Yeol Kim, Suwon-si, KR;
Sung Yong Lim, Suwon-si, KR;
Kyung-Sun Kim, Suwon-si, KR;
Dong Hyeon Na, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A plasma control device includes a chamber, in which a plasma process is performed, including a first electrode and a second electrode, a power generator connected to the second electrode and applying a bias voltage to the chamber, and a first impedance modulator connected to the first electrode and controlling the bias voltage applied to the chamber. The first impedance modulator includes a first impedance circuit unit including first impedance elements connected with each other in parallel and first switches respectively connected to the first impedance elements in series, and a first switch controller configured to receive a first pulse signal with a period, generate pulse unit signals shifted relative to each other by the period divided by a number of the first impedance elements, and control on/off timing of each of the first switches using the pulse unit signals.