The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Sep. 23, 2020
Applicant:
Hoya Corporation, Tokyo, JP;
Inventors:
Kota Suzuki, Tokyo, JP;
Takahiro Onoue, Tokyo, JP;
Assignee:
HOYA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/60 (2012.01); C03C 17/36 (2006.01); G03F 1/24 (2012.01); H01L 21/027 (2006.01); H10P 76/20 (2026.01);
U.S. Cl.
CPC ...
G03F 1/60 (2013.01); C03C 17/3636 (2013.01); C03C 17/3649 (2013.01); C03C 17/3665 (2013.01); G03F 1/24 (2013.01); H10P 76/2041 (2026.01); C03C 2217/254 (2013.01); C03C 2217/26 (2013.01); C03C 2218/154 (2013.01);
Abstract
A multilayered-reflective-film-provided substrate includes: a substrate; a multilayered reflective film provided on the substrate; and a protective film provided on the multilayered reflective film, in which the protective film includes ruthenium (Ru) and at least one additive material selected from aluminum (Al), yttrium (Y), zirconium (Zr), rhodium (Rh), and hafnium (Hf), and a content of the additive material is 5% or more by atom and less than 50% by atom.