The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2026

Filed:

Jul. 13, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Helinda Nominanda, San Jose, CA (US);

Tae Kyung Won, San Jose, CA (US);

Han Nguyen, San Jose, CA (US);

Seong Ho Yoo, San Ramon, CA (US);

Soo Young Choi, Fremont, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); G02B 1/11 (2015.01); G02B 1/14 (2015.01);
U.S. Cl.
CPC ...
G02B 1/14 (2015.01); C23C 14/024 (2013.01); C23C 14/06 (2013.01); C23C 16/0272 (2013.01); G02B 1/11 (2013.01);
Abstract

Implementations of the present disclosure relate to methods, and related apparatus and devices, of forming flexible cover lens structures for flexible or foldable display devices. In one or more implementations, one or more adhesion promotion layers are deposited above at least one wet hardcoat layer of a substrate structure. A dry hardcoat layer is deposited above the one or more adhesion promotion layers using a dry deposition process that includes plasma enhanced chemical vapor deposition (PECVD). An anti-smudge layer is deposited above the dry hardcoat layer. Each of the one or more adhesion promotion layers, the dry hardcoat layer, and the anti-smudge layer is deposited at a process temperature that is less than 80 degrees Celsius.


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