The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Jun. 04, 2024
Menlo Microsystems, Inc., Irvine, CA (US);
Maxwell Connor De Feijter, Menands, NY (US);
Chris Nassar, Hudson, NY (US);
Michael Reilly Comstock, Newtonville, NY (US);
Xu Zhu, Belmont, MA (US);
Menlo Microsystems, Inc., Irvine, CA (US);
Abstract
Embodiments disclose a micro-electrical-mechanical-system (MEMS) test-circuit structure. The test-circuit structure includes a wafer layer having an electrically conductive trace terminating to a plurality of respective pins at a first end of the electrically conductive trace and terminating to a plurality of connection locations at a second of the electrically conductive trace. The test-circuit structure also includes a plurality of connection probes coupled to the plurality of respective pins at the first end the electrically conductive trace, the connection probes are configured to electrically connect to the MEMS device under test. The electrical characteristics of the electrically conductive trace are measured from the plurality of connection probes to the plurality of connection locations having substantially identical electrical characteristics.