The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Jul. 15, 2022
Oerlikon Surface Solutions Ag, Pfäffikon, Pfäffikon, CH;
Jukka Kolehmainen, Espoo, FI;
Sanna Tervakangas, Espoo, FI;
Juha Haikola, Kirkkonummi, FI;
Juergen Becker, Geisenheim, DE;
Astrid Gies, Flaesch, CH;
Christian Scholz, Weiler, DE;
Esa Haikola, Kirkkonummi, FI;
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon, CH;
Abstract
A coating system to be used as thin film sensor includes a piezoresistive sensor element. The piezoresistive sensor element is a layer embedded in the coating system. The coating system is deposited on a surface of a substrate. The piezoresistive sensor element comprises at least one hydrogen free tetrahedral amorphous carbon coating doped with a ta-C:X coating layer, where X is one or more chemical elements selected from the elements groups 13 and 15 of periodic table of elements, wherein the ta-C:X coating layer exhibits an anisotropic gage factor.