The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Aug. 19, 2022
Silicon Microgravity Limited, Waterbeach, GB;
Madan Parajuli, Cambridge, GB;
Ashwin Seshia, Cambridge, GB;
Silicon Microgravity Limited, Cambridge, GB;
Abstract
An inertial sensor comprising; a central anchor; a proof mass, wherein the proof mass surrounds the central anchor; a flexure; and a plurality of electrodes is disclosed. The flexure has a shape comprising a first plurality of spiral arms, each winding about the central anchor in a first sense, and a second plurality of spiral arms, each winding about the central anchor in a second sense, the second sense being opposite to the first sense Each of the arms are connected between the central anchor and the proof mass. Advantageously, energy lost through anchor losses and thermoelastic dissipation are reduced in this arrangement, resulting in a higher quality factor for the modes of vibration.