The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Sep. 11, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Damon K. Cox, Jarrell, TX (US);
Ali Utku Pehlivan, Austin, TX (US);
Paul Benjamin Reuter, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/16 (2006.01); H01L 21/683 (2006.01); H10P 72/50 (2026.01); H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
B25J 9/163 (2013.01); H10P 72/50 (2026.01); H10P 72/722 (2026.01);
Abstract
A method includes causing an upper process kit ring to be removed from a lower process kit ring. The method further includes, responsive to causing the upper process kit ring to be removed from the lower process kit ring, causing, based on sensor data, a first position correction associated with the lower process kit ring. The method further includes, responsive to the first position correction, causing the upper process kit ring to be disposed on the lower process kit ring.