The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2026

Filed:

Aug. 31, 2021
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Stefan Teusch, Reutlingen, DE;

Heike Raatz, Stuttgart, DE;

Joachim Frangen, Heilbronn, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/30 (2026.01);
U.S. Cl.
CPC ...
H10P 72/3411 (2026.01); H10P 72/3302 (2026.01); H10P 72/3402 (2026.01); H10P 72/3404 (2026.01);
Abstract

The disclosure relates to a conveyor device which is designed to simultaneously convey a plurality of payloads, in particular wafers. Each payload is paired with a transport body (mover) which can be moved and positioned in a floating manner over a surface of a stator, and the transport body is moved and positioned preferably with respect to all six degrees of freedom. The transport body and the paired payloads are received in a sealed transport chamber, the stator is arranged below the sealed transport chamber, the floor of the transport chamber is arranged above the surface of the stator and parallel thereto, and the housing of each transport body is likewise preferably sealed.


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