The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Jun. 21, 2023
Niterra Co., Ltd., Nagoya, JP;
Shun Usui, Nagoya, JP;
Shiro Inoue, Nagoya, JP;
Sumio Ota, Nagoya, JP;
Honami Ohara, Nagoya, JP;
Takumi Sanari, Nagoya-shi, JP;
NITERRA CO., LTD., Nagoya, JP;
Abstract
A holding device includes a ceramic substrate including a plate-shaped member containing ceramics as a main component and including a first surface for holding an object and a gas flow path formed therein. The gas flow path includes, in a part thereof, a porous region that is a region in which a gas-permeable porous body that contains ceramics as a main component and includes a large number of pores is disposed. The porous body includes, as the pores, a large number of large-diameter pores whose median particle diameter is greater than 20 μm and less than or equal to 55 μm and a large number of small-diameter pores whose median particle diameter is greater than or equal to 3 μm and less than or equal to 20 μm. A volume percent of the large-diameter pores is greater than a volume percent of the small-diameter pores.