Mark detection method and computer program

Abstract

An encoding step and an image selection step are performed by a computer. In the encoding step, a plurality of partial images Dof an object are input to a learned VAE model M, and the plurality of partial images Dare encoded to a plurality of latent variables in a multi-dimensional latent space. In the image selection step, one or more partial images Dthat are likely to include an alignment mark are selected on the basis of a distribution of the plurality of latent variables in the latent space. Thus, a partial image that is likely to include an alignment mark is automatically detected by the computerwith the use of the VAE model M. This can lighten a burden on an operator who searches for an alignment mark.