The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Nov. 01, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Robert C. Pack, Morgan Hill, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electronic device manufacturing system configured to performing, by manufacturing equipment, a first process on a first substrate according to a process recipe, wherein the process recipe comprises a plurality of setting parameters. The system then generates metrology data associated with a plurality of features and inputs the metrology data into one or more Bayesian probabilistic models. The system then receives an output from the one or more Bayesian probabilistic models based on the metrology data and at least one settings parameter of the plurality of setting parameters. The system then updates, based on the output of the one or more Bayesian probabilistic models, the process recipe by modifying at least one setting parameter of the plurality of setting parameters, and performs, by the manufacturing equipment, a second process on a second substrate according to the updated process recipe.