The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Aug. 07, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Farzad Vakilzadeh, San Jose, CA (US);
Shawn Thanhson Le, Manteca, CA (US);
Ofer Amir, Half Moon Bay, CA (US);
Ramon Zaragoza, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A slit valve gate includes a base portion, a seal portion, and a clamp portion. The base portion is configured to a slit valve actuator and includes a first angled alignment feature. The seal portion is coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The clamp portion is coupled to the base portion. The clamp portion includes a second angled alignment feature configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.