The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Oct. 23, 2020
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Kenji Mochidzuki, Tokyo, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); F04B 37/02 (2006.01); F04B 37/14 (2006.01); F04B 49/06 (2006.01);
U.S. Cl.
CPC ...
F04B 37/085 (2013.01); F04B 37/02 (2013.01); F04B 37/14 (2013.01); F04B 49/06 (2013.01); F04B 2201/0801 (2013.01); F04B 2205/01 (2013.01);
Abstract
A cryopump includes a cryopanel, and an adsorption area provided on the cryopanel and capable of adsorbing a non-condensable gas, in which the adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof. The adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof.