The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Mar. 09, 2022
Kurita Water Industries Ltd., Tokyo, JP;
Yuuichi Ogawa, Tokyo, JP;
KURITA WATER INDUSTRIES LTD., Tokyo, JP;
Abstract
Functional aqueous solution supply apparatus () has a replenishment water production unit () that is supplied with ultrapure water (W) from a pipe conduit () and produces functional aqueous solution as washing water (W), a storage tank () that is supplied/replenished with the produced washing water (W) via a pipe (), and a circulation pipe conduit () that supplies the washing water (W) from the storage tank () to single-wafer type washers (A,B,C, andD) and returns unused washing water (W) to the storage tank (). The circulation pipe conduit () is branched into supply pipes (A,B,C, andD) and is further connected to return pipes (A,B,C, andD) that communicate into the circulation pipe conduit () from the washers (A,B, . . . ), respectively. The operation plan of the washers (A,B, . . . ) is preliminarily transmitted to a control means (), and this control means () can control the replenishment water production unit (). Such a functional aqueous solution supply apparatus can supply the functional aqueous solution as the washing water to use points such as washing apparatuses for electronic components/electronic members, etc.