The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Sep. 30, 2022
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Sang Hyun Son, Busan, KR;
Yong-Jun Seo, Hwaseong-si, KR;
Su Jin Chae, Suwon-si, KR;
Dong Ok Ahn, Anyang-si, KR;
Jae Hong Kim, Asan-si, KR;
Assignee:
Semes Co., Ltd., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 74/00 (2026.01); H10P 72/00 (2026.01); H10P 72/30 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 74/277 (2026.01); H10P 72/0612 (2026.01); H10P 72/3302 (2026.01); H10P 72/7602 (2026.01);
Abstract
The inventive concept provides a sensor station. The sensor station includes a body providing an inner space for storing a substrate-type sensor; a power source unit installed at the body and configured to transmit a power to the substrate-type sensor; a processing unit installed at the body and configured to process a data measured by the substrate-type sensor; and a communication unit installed at the body and configured to exchange a data with the substrate-type sensor and a server of a substrate treating system.