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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12690393 B1

PDFFull Text
Date of Patent:
Jul. 21, 2026

Filed:

Nov. 21, 2022

Film structure and method for producing the same

Applicant:

I-pex Piezo Solutions Inc., Yamaguchi, JP;

Inventors:

Akio Konishi, Yamaguchi, JP;

Hiroaki Kanamori, Yamaguchi, JP;

Assignee:

I-PEX PIEZO SOLUTIONS INC., Yamaguchi, JP;

Attorney:

Wenderoth, Lind & Ponack, L.L.P.

Primary Examiner:

Bumsuk Won

Int. Cl.
CPC ...
H10N 30/00 (2023.01); C30B 23/02 (2006.01); C30B 29/02 (2006.01); C30B 29/32 (2006.01); C30B 29/68 (2006.01); H10N 30/076 (2023.01); H10N 30/079 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
H10N 30/708 (2024.05); C30B 23/025 (2013.01); C30B 29/02 (2013.01); C30B 29/32 (2013.01); C30B 29/68 (2013.01); H10N 30/076 (2023.02); H10N 30/079 (2023.02); H10N 30/853 (2023.02); H10N 30/8542 (2023.02); H10N 30/8554 (2023.02);
Abstract

A film structure comprises a substrate and a buffer film formed on the substrate. The substrate is a 36° to 48° rotated Y-cut Si substrate, or the substrate is a SOI substrate comprising a base substance made of the 36° to 48° rotated Y-cut Si substrate, an insulating layer on the base substance, and a SOI layer made of a Si film on the insulating layer, and a Miller index of a crystal plane of an upper surface of the SOI layer is equal to the Miller index of a crystal plane of an upper surface of the base substance. The buffer film comprises ZrOepitaxially grown on the substrate.

Find Patent Forward Citations

Konishi, Akio. (2026). Film structure and method for producing the same (U.S. Patent No. 12690393). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12690393

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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