The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Sep. 19, 2023
Samsung Display Co., Ltd., Yongin-si, KR;
Daesoo Kim, Yongin-si, KR;
Daewon Choi, Yongin-si, KR;
Yunjong Yeo, Yongin-si, KR;
Sungwon Cho, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A method for manufacturing a display panel is provided, the method including forming a semiconductor pattern on a base layer, applying at least one insulation layer on the semiconductor pattern, and applying a control electrode on the insulation layer so as to overlap at least a portion of the semiconductor pattern. The applying of the control electrode includes depositing molybdenum to form a preliminary electrode layer, forming a photoresist pattern on the preliminary electrode layer, and applying an etching gas to dry-etch the preliminary electrode layer. In an embodiment, in the dry-etching, the etching gas may include a nitrogen trifluoride gas, an oxygen gas, and a chlorine gas. Accordingly, it is possible to implement a manufacturing process of an eco-friendly display panel while increasing the yield and reliability of the display panel manufacturing process.