The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2026

Filed:

Jun. 28, 2023
Applicant:

Institute of Microelectronics, Chinese Academy of Sciences, Beijing, CN;

Inventor:

Huilong Zhu, Poughkeepsie, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 30/01 (2025.01); H10D 30/00 (2025.01); H10D 30/63 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 62/17 (2025.01); H10D 64/01 (2025.01); H10D 84/83 (2025.01); H10D 64/27 (2025.01); H10D 84/01 (2026.01);
U.S. Cl.
CPC ...
H10D 30/025 (2025.01); H10D 30/508 (2025.01); H10D 30/63 (2025.01); H10D 30/6735 (2025.01); H10D 62/122 (2025.01); H10D 62/292 (2025.01); H10D 64/021 (2025.01); H10D 84/83 (2025.01); H10D 64/519 (2025.01); H10D 84/0128 (2025.01);
Abstract

Disclosed are a semiconductor device with a spacer and a C-shaped channel portion, a method of manufacturing the same, and an electronic apparatus including the semiconductor device. The semiconductor device may include: a channel portion on a substrate, wherein the channel portion includes a curved nanosheet or nanowire with a C-shaped cross-section; a first source/drain portion and a second source/drain portion respectively located at upper and lower ends of the channel portion with respect to the substrate; a first gate stack and a second gate stack located on opposite sides of the channel portion; a first spacer located between the first gate stack and the first source/drain portion and between the first gate stack and the second source/drain portion respectively; and a second spacer located between the second gate stack and the first source/drain portion and between the second gate stack and the second source/drain portion respectively.


Find Patent Forward Citations

Loading…