Live chemical imaging with multiple detectors

Abstract

A method for analysing a specimen in a microscope is provided. The method comprises: acquiring a series of compound image frames using an electron detector, a first X-ray detector, and a second X-ray detector, wherein the first X-ray detector is positioned between the specimen and an electron beam source from which a focused electron beam emerges towards the specimen, and is provided with a filter member interposed between the first X-ray detector and the specimen and adapted to reduce the incidence of electrons on the first X-ray detector, wherein the second X-ray detector is provided with a deflector arrangement configured to reduce the incidence of electrons on the second X-ray detector, and wherein acquiring a compound image frame comprises: causing the focused electron beam to traverse a region of the specimen; monitoring a set of resulting electrons emitted from a plurality of locations within the region of the specimen, using the electron detector, so as to obtain a first image frame, the first image frame comprising a plurality of pixels corresponding to, and having values derived from the monitored electrons emitted from, the plurality of locations; monitoring first and second sets of resulting X-rays emitted from the plurality of locations using the first X-ray detector and the second X-ray detector respectively, so as to obtain one or more second image frames, each comprising a plurality of pixels corresponding to the plurality of locations and having values derived, in accordance with a first criterion, from monitored X rays characteristic of a respective chemical element and emitted from the plurality of locations, wherein the set of electrons and the first and second sets of X-rays are emitted from the specimen substantially simultaneously; and combining the first image frame and the one or more second image frames so as to produce the compound image frame, such that the compound image frame provides data derived from monitored electrons and X-rays emitted from the plurality of locations within the region, and displaying the series of compound image frames on a visual display, wherein the visual display is updated to show each compound image frame in sequence. A system for analysing a specimen in a microscope is also provided.