The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Feb. 14, 2023
Vat Holding Ag, Haag, CH;
VAT HOLDING AG, , CH;
Abstract
A vacuum valve includes a valve housing having a first port in the direction of a first axis, a second port in the direction of a second axis and a valve seat. The vacuum valve further includes: a valve disk, a drive unit, wherein a controlled displacement of the valve disk along or orthogonally to the first axis is provided by means of the drive unit, and a control unit for controlling the displacement of the valve disk. The vacuum valve has a pressure sensor to measure a process pressure present in the flow chamber can be measured. The control unit is configured to provide process information, the process pressure present in the flow chamber is measured by the pressure sensor, and the displacement of the valve disk is controlled as a function of the processed process information and the process pressure.